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Pressure Sensing in High-Refractive-Index Liquids Using Long-Period Gratings Nanocoated with Silicon Nitride

机译:使用氮化硅纳米涂层的长周期光栅在高折射率液体中的压力传感

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摘要

The paper presents a novel pressure sensor based on a silicon nitride (SiNx) nanocoated long-period grating (LPG). The high-temperature, radio-frequency plasma-enhanced chemical-vapor-deposited (RF PECVD) SiNx nanocoating was applied to tune the sensitivity of the LPG to the external refractive index. The technique allows for deposition of good quality, hard and wear-resistant nanofilms as required for optical sensors. Thanks to the SiNx nanocoating it is possible to overcome a limitation of working in the external-refractive-index range, which for a bare fiber cannot be close to that of the cladding. The nanocoated LPG-based sensing structure we developed is functional in high-refractive-index liquids (nd > 1.46) such as oil or gasoline, with pressure sensitivity as high as when water is used as a working liquid. The nanocoating developed for this experiment not only has the highest refractive index ever achieved in LPGs (n > 2.2 at λ = 1,550 nm), but is also the thinnest (<100 nm) able to tune the external-refractive-index sensitivity of the gratings. To the best of our knowledge, this is the first time a nanocoating has been applied on LPGs that is able to simultaneously tune the refractive-index sensitivity and to enable measurements of other parameters.
机译:本文提出了一种基于氮化硅(SiNx)纳米涂层长周期光栅(LPG)的新型压力传感器。高温,射频等离子体化学气相沉积(RF PECVD)SiNx纳米涂层的应用是为了调整LPG对外部折射率的敏感性。该技术允许沉积光学传感器所需的高质量,坚硬和耐磨的纳米膜。由于采用了SiNx纳米涂层,因此可以克服在外部折射率范围内工作的局限性,对于裸光纤而言,该范围不能接近包层的折射率。我们开发的基于纳米涂层的基于LPG的传感结构可在高折射率液体(nd> 1.46)(例如油或汽油)中发挥作用,其压力敏感性与使用水作为工作液体时一样高。为该实验开发的纳米涂层不仅在LPG中具有最高的折射率(在λ= 1,550 nm时n> 2.2),而且是能够调节液晶显示​​器的外部折射率灵敏度的最薄涂层(<100 nm)。光栅。据我们所知,这是首次在LPG上应用纳米涂层,该涂层能够同时调节折射率灵敏度并能够测量其他参数。

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