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Contactless processing of SiGe-melts in EML under reduced gravity

机译:重力作用下EML中SiGe熔体的非接触式处理

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摘要

The processing of semiconductors based on electromagnetic levitation is a challenge, because this kind of materials shows a poor electrical conductivity. Here, we report the results of measurements of the thermophysical properties obtained recently from highly doped semiconductors Si1−xGex under microgravity conditions in the framework of parabola flight campaigns. Due to the limited time of about 20 s of microgravity especially Ge-rich samples with low melting temperatures were investigated. The measurements were performed contactlessly by video techniques with subsequent digital image processing. Linear and volume thermal expansion coefficients were measured hereby from image data. An anomaly of volume changes near the solidus temperature is visible. Viscosity and surface tension were determined by the oscillating drop technique using optic and electronic data. It was observed that the alloying of Si into Ge increases the surface tension of the melts. The viscosity is following an Arrhenius equation and shows a crossover temperature which separates simple liquid at high temperatures from cooperative liquid at low temperatures.
机译:基于电磁悬浮的半导体加工是一个挑战,因为这种材料显示出较差的导电性。在这里,我们报告了在抛物线飞行运动框架下,在微重力条件下,最近从高掺杂半导体Si1-xGex获得的热物理性质的测量结果。由于有限的时间约20微秒的微重力,特别是研究了低熔化温度的富含Ge的样品。通过视频技术非接触地进行测量,然后进行数字图像处理。由此,从图像数据测量线性和体积热膨胀系数。固相线温度附近的体积变化异常可见。通过使用光学和电子数据的振荡滴技术确定粘度和表面张力。可以看出,Si合金化为Ge会增加熔体的表面张力。粘度遵循Arrhenius方程,并显示了一个交叉温度,该温度将高温下的简单液体与低温下的协作液体分开。

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