针对不同类型热敏MEMS器件的高性能前置放大器设计

摘要

Aiming at various application interface circuits of MEMS thermal sensors, high performance preamplifiers is designed. The concept of setting up IP library of pre-amplifiers for CMOS-process-compatible MEMS thermal sensors is proposed. By extracting related devices typical parameters, pre-amplifiers which is low-power, low-noise and meet special requirements such as precision and speed are designed. Three different strnctures of amplifiers are analyzed based on CSMC 0. 5 xm CMOS standard process library are designed and simulated by Cadence software. Simulation results show that three different structures amplifier can be used in MEMS thermal sensors for relevant performance requirements.%针对不同应用的热敏MEMS器件的界面电路设计高性能放大器,提出建立与CMOS工艺兼容的热敏MEMS器件前置放大器的IP库的概念.通过提取相关热敏器件的典型参数,设计低功耗、低噪声且分别符合精度和速度等特殊要求的前置放大器,对3种不同结构的放大器进行分析研究,并利用Cadence 软件,基于CSMC 0.5 μm标准CMOS工艺库进行设计仿真.仿真结果表明:3种不同结构的放大器可以用于相应性能要求的热敏MEMS器件中.