Structural Design and Control Strategy Analysis of Micro/Nano Transmission Platform

摘要

A fully flexure micro/nano transmission platform(MNTP)which has five degrees of freedom is designed on the basis of bridge type amplification mechanism.According to the kinematic theory and the elastic beam theory,the theoretical output displacement equation of the platform is derived,and then piezoelectric actuator(PZT)is calibrated.Meanwhile,a full closed-loop control strategy of the platform is established using the feedforward proportional-integral-derivative(PID)compound control algorithm based on the Preisach model.Moreover,the total transfer function of the micro positioning system is derived,and the calculation method of output signal is acquired.Finally,the theoretical output displacement is verified by finite element analysis(FEA)and positioning experiments.