Surface dielectric barrier discharge (SDBD) plasma for biomedical application and environmental protection has been extensively studied due to its good performance in efficient generation of reactive species.The configuration and power supply parameters of SDBD device have great influences on its discharge characteristics and the generation of reactive species.Therefore,their effects are studied in a tubular SDBD device with coil wire electrode.The experimental results indicate that the pitch of coil wire electrode and the thickness of dielectric affect the intensity of electric field and its spatial distribution,the discharge power and the ozone generation,while the diameter of coil wire electrode has almost no effect on the discharge power and ozone.The discharge power and ozone yield increase with the increase of pitch until it reaches 25mm,and then tend to be invariable when the pitch is more than 25mm.Moreover,the discharge power and ozone yield increase about 2 times and 3 times respectively at the same applied voltage when the thickness of dielectric decreases from 3 mm to 1.6mm.Compared with a 50Hz AC power supply,when SDBD device is supplied with a 9.6kHz AC power supply,the discharge power and ozone yield increase with discharge frequency,and an 25％ increase in the energy yield of ozone is obtained.%沿面介质阻挡放电(SDBD)等离子体能够高效生成反应活性物质,在生物医学、环保等应用领域得到广泛研究.SDBD装置的结构和供电电源参数是影响其放电特性及反应活性物质生成的主要因素,为此,以具有螺环线形高压电极的管状沿面放电装置为对象,研究了装置结构及供电电源对其放电特性及臭氧生成的影响.结果表明:在相同的供电电压下,螺环线形高压电极的螺距、介质厚度影响电极间的电场强度和分布、放电功率和臭氧生成量,但螺环线形高压电极的线径对放电功率和臭氧生成量几乎没有影响;螺环线形高压电极的螺距存在一个优化值,在螺距低于25mm时,放电功率和臭氧产生量随着螺距的增加而增加,当螺距大于25mm时,放电功率和臭氧产生量基本不再变化;当绝缘介质管厚度由3mm减小到1.6mm时,放电功率提高约2倍,臭氧产生量提高约3倍.同采用50Hz交流电源供电相比,SDBD装置采用9.6kHz高频电源供电时,在较低的电压下即可获得较大的放电功率及臭氧产量,且臭氧生成的能量效率提高约25％.
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