压力传感器零点温漂的两种补偿方法比较

摘要

压阻式压力传感器在实际应用中普遍存在零位偏离和零位温度漂移现象，这就降低了传感器的测量精度，因此需采取适当的补偿方法对这两种现象产生的误差进行修正，从而提高测量精度。文中分别通过电桥臂一串一并的硬件补偿方法及基于规范化多项式拟合算法的软件补偿方法同时实现平衡零位与补偿零位漂移。由模型推导分析及实验最终得出，通过规范化多项式计算方法拟合出的数据精度较高，补偿效果好于一串一并的硬件补偿方法。%Zero drift and zero temperature drift generally exist in practical application of piezoresistive pressure sen-sors,which leads to loss of measuring accuracy of sensors.Therefore,appropriate compensation method needs to be adopt-ed for error correction,thus improving measuring accuracy.The paper provides two methods to achieve null balance and compensate zero drift simultaneously,the hardware method of bridge arm in series and parallel and the software method based on normalized polynomial fitting algorithm.According to model analysis and deduction as well as experiments,statis-tics obtained through normalized polynomial fitting algorithm shows higher accuracy and better compensation effect than the hardware compensation method of bridge arm in series and parallel.