可调谐半导体激光吸收光谱技术检测痕量乙烯气体的系统研制

摘要

可调谐半导体激光吸收光谱技术(TDLAS)利用激光器的窄线宽和波长调谐特性,使其扫描被测气体的单个吸收峰,实现痕量气体的高分辨率、高灵敏度快速检测.通过分析近红外波段的乙烯吸收谱线特性,选取1 626.8 nm附近的吸收峰作为检测谱线,研制了基于white池结构的TDLAS检测系统,结合波长调制和二次谐波检测,对体积分数为20～1 200 ppmv的乙烯气体进行了测量,推算该系统的检测下限约为10 ppmv.%Tunable diode laser absorption spectroscopy (TDLAS) was characterized by ultra-narrow line width laser and wavelength modulation, which makes it possible to scan a single absorption line. TDLAS has an advantage in trace gas analysis for its high resolution, high sensitivity and quick response. The 1 626. 8 nm absorption line of ethylene was selected for detecting by analyzing its absorption line characteristic. The TDLAS system was developed with a white type multi-pass cell, combined with wavelength modulation and harmonic detection. Ethylene concentration ranges from 20 to 1 200 ppmv were tested using this system. The estimated detection limit of the system is 10 ppmv.