铁基多层纳米磁性薄膜的组织与磁性能研究

摘要

Ferrous magnetic nano-films were obtained by sputtering technology. The thickness of films could be controlled by adjusting the parameter of sputtering process. The films became crystal after tempered. At last, the magnetic properties of the films were measured.%利用表面刻蚀镀膜技术制备了铁基多层纳米磁性薄膜,通过刻蚀镀膜控制参数的调整,可以精确地控制薄膜的厚度.然后对薄膜进行退火处理,使薄膜晶化.最后,对薄膜磁性能进行了测量.