At this stage of solar vacuum tubes used in membrane layer mostly ALN/AL-N/AL gradient process or ALN/AL-SS-N/Cu interference in membrane technology. This paper developed a high heat resistance ofα-C:H composite membrane system. Instead of ALN/AL and ALN/AL-SS-N/Cu two process, Produced in service life, thermal performance such as quality and technical aspects were significantly superior to the national standard and the vacuum tube all-glass vacuum tube products.%现阶段的太阳能真空管采用的膜层绝大多数是ALN/AL-N/AL渐变工艺或ALN/AL-SS-N/Cu干涉膜工艺。本文研制出一种具有高耐热性的α-C:H复合膜系,替代ALN/AL-N/AL和ALN/AL-SS-N/Cu两种工艺,生产出在使用寿命、热性能指标等质量和技术方面均大幅优于国家标准和现行真空管的全玻璃真空管产品。
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