紫外光刻技术制备各向异性超疏水表面

摘要

结合紫外光刻技术与湿化学刻蚀法,将掩模板上的条纹结构转移到锌基体上;然后利用月桂酸修饰降低表面能,制备出具有不同间距条纹结构的各向异性超疏水表面.使用接触角测量仪表征其浸润性、偏光显微镜表征其形貌结构、傅里叶红外光谱仪分析表面成分,利用接触角测量仪搭建简易的平台探究制备的具有条纹结构的各向异性超疏水表面的减阻性能.掩模板上5、10、15、30μm间距的条纹图案很好地转移到了锌基体上,经月桂酸修饰后接触角最高达156.26°.当间距d=30μm时,各向异性浸润性最显著,ΔCA=9.93°.实验表明可通过调节条纹间距来控制各向异性浸润性,各向异性浸润性程度ΔCA随条纹间距的增加而增加,平行于各向异性超疏水表面的条纹结构方向有一定的减阻性能.利用该方法可制备特殊结构的各向异性超疏水表面,用于流体定向减阻与运输,微流体器件等领域.%The stripe structure on the mask plate was transferred to the zinc substrate by combining ultraviolet ( UV ) photolithography and wet chemical etching , and the anisotropic superhydrophobic surfaces with different stripe spacing were prepared by modifying the surface with lauric acid to lower down surface energy .The wettability was measured by the contact angle measurement instrument , and its morphology was characterized by polarizing mi-croscope , the surface composition was analyzed by Fourier transform infrared spectrometer .The drag-reduction per-formance of as-prepared anisotropic superhydrophobic surface with stripe structure was explored by a simple plat -form built with contact angle measurement instrument .The stripe pattern with the spacing of 5, 10, 15, 30μm on the mask plate was well transferred to the zinc substrate , and the contact angle was as high as 156.26 °after being modified by lauric acid.When d=30 μm, the degree of anisotropy is most significant ,ΔCA=9.93°.The experi-mental results show that the anisotropic wettability can be controlled by adjusting the stripe spacing , the degree of anisotropic wettability increases with the increase of stripe spacing , and the as-prepared anisotropic superhydropho-bic surface has a certain drag reduction performance .Anisotropic superhydrophobic surface with special structure can be prepared by this method for applications in the filed of fluid directional drag-reduction and transportation , microfluidic devices and other fields .