Multilayer Nb2O5 nanoporous films were successfully synthesized on Nb surfaces by the control anodization process in ethylene glycol containing 4 vol% HF and 2 vol% H2O2 electrolyte. The nanoporous films are characterized in detail by field-emission scanning electron microscopy(FESEM), transmission electron microscopy(TEM), and X-ray diffraction(XRD). The Nb2O5 nanoporous films have a multilayer morphology with the side wall thickness of *5 nm, irregular pores with a diameter of *25 nm, and a length of up to 7.39 lm, depending on the anodization time. A mechanism for the multilayer Nb2O5 nanoporous formation was also discussed. These nanoporous materials can be very useful in the fields of solar cells, gas sensors, catalysts, optical filters, and capacitors.
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