利用激光脉冲沉积( PLD)技术在室温条件下将IZO薄膜生长在塑料衬底上，通过控制生长压强来调节薄膜的电学性质。然后对光电性质最优的薄膜进行了柔性测试，结果显示薄膜的内弯折半径小于9 mm 后电阻会显著增加，对于弯折引起的电学性能的变化进行了初步的讨论。%Indium-zinc-oxide films were deposited onto plastic wafer by pulsed laser deposition( PLD) at room temperature. Their electrical properties can be modulated by varying growth pressure. Then,flexible tests have been carried out,and the effect of bending on electrical pro’ perties has also been explained.
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