辉光放电等离子体特性实验研究

摘要

Briefly introduces the basic principles to measure plasma parameters by Langmuir probe. Plasma pa-rameters is measured respectively in two methods,with the experiment data processed and calculated,and the experiment result analyzed and discussed.%介绍了朗缪尔探针法测等离子参量实验的基本原理. 分别利用两种方法对等离子参量进行测量,对实验数据进行处理、计算,并对结果做了分析、讨论.