Based on the Michelson interferometer,silicon photovoltaic cells are used as a sensor to detect bub-ble size inside the rubber plate. A reflective aluminum film is stick on the rubber surface. With method of vacu-um or heating,the bubble would expand and the interference fringes would move along with the surface deform-ation. Based on the rapid response to changes in light intensity,oscilloscope could get the voltage pulse signal from silicon photovoltaic cells and calculate the size of the tiny changes on the rubber plate surface.%本文基于迈克尔逊干涉光路,采用硅光电池作为传感器,检测橡胶板的内部气泡尺寸。该方法在橡胶板上粘贴反射铝膜,采用抽真空或加热的方法,使橡胶板内部气泡发生膨胀,从而使干涉条纹随着表面形变发生移动。基于硅光电池对于光强变化的快速响应,示波器可采集干涉条纹的移动电压脉冲信号,从而计算出橡胶板表面微小形变尺寸。
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