激光偏角测量技术研究

摘要

介绍一种采用激光测量反射镜偏角的方法，它适合于光学系统装配时的测量。采用CCD细分技术对成象光斑质心进行提取，提高了偏角测量精度，在1.25°的测量范围内，可以达到±3″的测量精度。%A method for measuring deflection angle of mirror with laser isintroduced.It is suitable for the measurement in assembling of an optical system.The centroid of imaging spot is extracted with CCD subdivision technique,thus the measuring accuracy of the deflection angle can be improved.Within the measuring range of 1.25°,a measuring accuracy of ±3″ can be achieved.