滑块轴承时变润滑油膜厚度测量系统

摘要

In order to obtain the transient lubricating film thickness of slider bearings, a conformal contact film thickness measurement system has been developed based on dichromatic interferometry.Firstly, the basic setup of the slider bearing tester is introduced together with its working principle. The method and the resolution of dichromatic equivalent wavelength for relative large film thickness measurement are also thoroughly analyzed. Then, a plain and feasible approach is proposed for transient film thickness measurement, whereby fringe order of equivalent wavelength is conducted through dark characterized fringes and the corresponding fringe order of red or green monochromatic light is identified with modulated intensity signal to infer the film thickness. Theoretical and experimental results indicate that the well built system can be used to measure transient lubricating film thickness. The resolution of the dichromatic interference method is 0.6 nm with a measurement range from 10 nm to 5.5μm, and the precision is 22 nm.%建立了基于双色光干涉的滑块轴承油膜厚度测量系统，对时变工况下滑块轴承瞬态润滑油膜厚度进行测量。首先，介绍了系统的硬件配置及工作原理。接着，分析了双色光干涉的等效波长测量方法与分辨率。然后，给出了利用双色激光干涉图像中黑色特征条纹对等效波长进行干涉级次计数，并结合红绿光强调制的信息判断出对应的单色光的干涉级次，进而得到滑块轴承瞬态油膜厚度的方法。理论和测量结果表明：所搭建系统能够实现滑块轴承时变膜厚测量，测量分辨力为0.6 nm；油膜测量范围为10 nm ~5.5μm，精度为22 nm。