用于多频振动的MEMS复合式能量采集器的设计

摘要

设计、模拟了一款用于多频振动的MEMS复合式能量采集器,提出了一种新颖的能量采集结构,即将压电式悬臂梁和可变电容器结合起来用于多频振动能量的采集.在建立多频振动能量采集系统分析模型的基础上,使用MatLab/SIMULINK的数值模拟,预测了功率输出.模拟结果显示,该结构可在630～655 Hz有效工作,在负载为50 kΩ时,输出功率可达13.46 μW.基于这个结果,给出了一个优化设计方案,同时为了防止结构失效,对结构进行了有限元仿真分析.仿真分析结果显示了良好的预期性能,说明了该设计指导思想的合理性和先进性.%The design, modeling and simulation of a novel MEMS hybrid energy generator for multi-frequency vibration is presented to meet the requirements of portable and wireless electronic devices for collecting energy from the ambient environment. In this design, piezoelectric cantilever beams and capacitors are combined for harvesting the hybrid vibration energy. Then,an analytical model is established for the multi-frequency vibration energy harvesting system and a numerical simulation method is used to predict the power output by using a MatLab/SIMULINK. The result shows that the structure can work efficiently in the frequency ranges of 630-655 Hz, and the power output can reach about 13.46 μW with a load resistance of 50 kΩ. Based on the result, an optimized multi-frequency hybrid energy harvester is designed in this paper. In addition, the Finite Element Analysis (FEA) of the structure is carried out to prevent the structure failure. The work implemented by this paper shows that the next generation design with a wider frequency range and a higher power output within a smaller structure volume is expectant.