温度自补偿高灵敏度非本征光纤珐珀横向负载传感器

摘要

In order to improve the sensitivity of optical fiber EFPI sensors,a novel EFPI sensor structure was proposed,and its characteristics of temperature and transverse load were studied.Firstly,the structure and fabrication of the optical fiber EFPI sensor with its edge coated with palladium-gold were introduced.Then,the temperature sensing model of fiber optic EFPI coated with palladium-gold was established,and the relationship between change of cavity length and pressure was obtained in theoretical simulation of the sensor under different pressures by Solidworks,Hypermesh and finite element analysis software ANSYS.Finally,the comparison of temperature and transverse load characteristics between the traditional optical fiber EFPI and the palladium-gold coated optical fiber EFPI was implemented.Experimental results show that the temperature sensitivity of the palladium-gold coated optical fiber EFPI is 6.083 pm/℃ due to its characteristic of temperature self-compensation.Moreover,the detection sensitivity of transverse load can reach 40.83 m/g,which has been improved by 2.10 times compared with the one of the traditional optical fiber EFPI.The experimental results coincide with the theoretical analysis,providing theoretical and experimental evidences for the production of optical fiber EFPI with high sensitivity and temperature self-compensation practically.%为了提高光纤EFPI传感器的灵敏度,提出了一种新型EFPI传感结构,并对其温度特性以及横向负载特性进行了研究.首先,介绍了采用端面镀钯金膜的光纤EFPI传感器的结构及其制作方法;接着,建立了镀钯金膜光纤EFPI的温度传感模型,并通过Solidworks、Hypermesh与有限元分析软件ANSYS联合仿真,对它在不同受压力下进行理论模拟,获得了腔长变化与压力之间的关系;最后,对传统的光纤EFPI与镀钯金膜光纤EFPI的温度和横向负载特性进行了对比试验.试验结果表明,镀钯金膜光纤EFPI的温度灵敏度为6.083pm/℃,具有温度自补偿特性;它对横向负载的检测灵敏度可达40.83m/g,相对于传统的光纤EFPI横向负载的灵敏度提高了2.10倍.实验结果与理论分析相符合,为实际制作具有温度自补偿的高灵敏度光纤EFPI传感器提供了理论与实验依据.