二级杠杆柔性铰链复合结构的双足压电直线电机

摘要

为实现精密机械装置的快速定位,增加压电直线电机中位移放大结构对压电叠堆输出位移的放大能力,提出了一种基于二级杠杆和柔性铰链复合结构的新型双足压电直线电机.首先,对电机的作动原理进行分析,推导了驱动足轨迹方程.为提高其输出性能,对直圆型柔性铰链的参数进行了优化,得到最佳铰链参数为厚度 th=0.2 mm、切割半径 Rh=1 mm和宽度bh=10 mm.最后,制作了该电机样机并进行了振幅、速度和负载性能测试,基于正交试验方法对电机速度进行了分析,得出电压对电机速度的影响更灵敏.实验结果表明,驱动足Ⅰ、Ⅱ的位移振幅分别在75 μm和63 μm附近波动,差值约为12 μm;在120 V、110 Hz的信号激励下速度达16.163 mm/s,最大负载能力为1.7 N.与现有的压电直线电机相比较,该电机结构简单,易于安装调试,具有响应快、大振幅、速度大且运行稳定的特点.%In order to improve the rapid positioning of precision mechanical devices and the amplification ability of displacement amplification structures for the output displacement of piezoelectric stacks in piezoelectric linear motors,a new kind of double-foot driving piezoelectric linear motor with secondary lever and flexible hinge was proposed.First,the operating principle of the motor was analyzed and the trajectory equation of the driving feet was formulated.Next,the parameters of the straight circular flexure hinge were optimized in order to improve the output performance;the optimal hinge parameters obtained were thickness th=0.2 mm,cutting radius Rh=1 mm,and width bh=10 mm.Finally,the prototype motor was designed,and the amplitude,speed,and load performance were tested.The motor speed was analyzed based on the orthogonal test method;our analysis revealed the sensitivity of the motor speed on the voltage.Our experimental results revealed displacement amplitudes of the driving feet Ⅰ and Ⅱ in the range of 75 μm and 63 μm,respectively,i.e.,the difference is about 12 μm.Furthermore,the speed was observed to reach 16.163 mm/s under a voltage of 120 V and a signal excitation of frequency 110 Hz,and a maximum load capacity of 1.7 N was obtained.Compared with existing piezoelectric linear motors, our motor possesses the advantages of a simple structure,easy installation and debugging,fast response,large amplitude,high speed,and stable operation.