An electron cyclotron resonance ion source model that uses a coaxial antenna to inject the RF power was simulated, and the corresponding hydrogen plasma densities of the ion source were calculated at different magnetic field distributions via a fluid model. The results show that most of the microwave power is absorbed around the resonance surface near the antenna when the plasma density is below the cutoff density of 7.4 × 10^(16) m^(-3) for 2.45 GHz microwaves, and the simulation results also show that the plasma density is strongly influenced by the position and shape of the resonance surface, where a larger resonance surface would improve the plasma density.
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