四极质谱计气体分析与测量系统的研制

摘要

介绍了为开展漏孔检测、氘-氦分辨性能及真空检漏技术等相关实验研究而进行的四极质谱计分析与测量系统的研制,描述了真空室结构、抽气设备的选型、测量仪器的选择及控制保护子系统工作方式.对系统进行了包括极限真空、残余气体质谱分析、漏放气率、质谱计性能等测试,结果表明本系统达到了设计要求.%The gas analysis and testing system of quadrupole mass spectrometer was designed to research leak calibration,discrimination between helium and deuterium,and leak testing technology. The paper describe the structure of vacuum chamber,selection of pumping equipments,choice of measuring instruments,and working mode of control protection subsystem. The performance experiments of the system,including ultimate vacuum,mass spectrometric analysis of residual gas,leak and outgassing rate,and performance of mass spectrometer,are given. The experimental results show that the gas analysis and testing system satisfies our design requirements.