接触粘着是MEMS失效的主要原因之一。基于Hamaker三假设用连续方法进行纳米接触仿真是一种高效的近似方法。然而，由于没有考虑物体表层的微观结构，连续方法只能讨论较远距离的引力。通过改进，提出了一种考虑表面原子结构对粘着计算的数值方法，改进后的方法在较近距离上有着更高的精度，且可以用以讨论斥力。该方法对于MEMS的设计具有一定指导意义。%Adhesive contact is one of the major reasons that cause the failure of MEMS. It is an efficient approximation method to carry out contact simulation in nano-scale based on Hamaker hypothesis. The continuous method works can only be used to calculate long range attraction, because it neglects the microstructure of the surface of the object. A new numeral method considering adhesion of structure of surface atoms is put forward through improvement, which is more accurate in short range and can be used to calculate repulsion. The method is of certain guiding significance for designing MEMS.
展开▼
