State Key Laboratory of Precision Measuring Technology and Instruments Tianjin University Tianjin 300072 China;
State Key Laboratory of Precision Measuring Technology and Instruments Tianjin University Tianjin 300072 China;
Science and Technology on Rotorcraft Aeromechanics Laboratory China Helicopter Research and Development Institute Jingdezhen 333001 China;
State Key Laboratory of Precision Measuring Technology and Instruments Tianjin University Tianjin 300072 China;
Micro laser galvanometer scanner; Deflection angle; Narrow space; Shapes of permanent magnets; Nonlinearity error;