基于LABVIEW的高精度光栅细分方法

摘要

The basic content of grating measurement technique is the count and the subdivision of the grating signal.The resolution of high-precision grating measurement requires to reach the nanometer or even micro-nanometer.It can not be achieved to improve the accuracy and resolution by increasing the grating groove density.We can only do subdivision processing to improve the accuracy of the grating measurement.In this paper,we used labview software to get a method of subdivision,and used sine signal,cosine signal,the absolute value of difference about the sine and cosine signal to divided a periodic signal into eight intervals.The subdivision values for each interval was calculated and then Labview software was used to write programs about the subdivision of grating signal.%光栅测量技术的基本内容主要是光栅信号的计数和细分问题。高精度的光栅测量其分辨率要求达到纳米级甚至微纳米级。通过提高光栅刻线密度来提高其测量精度和分辨率是无法达到的。为了使光栅测量具有更高的精度,我们只能对光栅信号进行细分处理。在本文中我们利用LABVIEW软件提出一种软件细分方法,利用光栅信号的两路信号的正负以及绝对值差的正负将信号周期分为八个区间,计算出每个区间的细分值,并且用LABVIEW软件进行编程,从而达到细分的效果。