ICP-MS射频电源离子化效率研究

摘要

电感耦合等离子体四板杆质谱仪是现在应用最广泛的仪器之一,此仪器的国产化具有重要的意义.作为国家重大科学仪器开发项目中的仪器研制单位,公司通过自主研发,研制了等离子体四极杆质谱仪.射频电源作为电感耦合等离子体质谱仪的核心部件之一,射频电源的离子化效率决定了仪器的基本性能.通过不断改进射频电源设计,比较研究了不同基体中,射频电源功率及仪器进样量的改变对不同元素的影响.由结果可知各元素在高功率及低进样量时,基体效应最小、离子化效率最高,各元素在不同基体中的回收率均可达到80％～100％之间,满足电感耦合等离子体质谱仪的应用需求.%Inductively coupled plasma mass spectrometer is one of the most widely employed instrument in Chinese market.This instrument has important significance for localization.As a member of National Key Scientific Instrumentation Development Project,our company has built the quadrupole inductively coupled plasma mass spectrometer.RF power supply as a main components of the inductively coupled plasma mass spectrometer,the ionization efficiency of RF power supply determines the basic performance of the instrument.Through the continuous improvement of the RF power supply design,the effect of different power supply and amount of sample introduction on elements in various matrix was studied.The results showed that the elements have the smallest matrix effect at high power and low sample introduction,the recovery of each element in different matrix can reach 80％ ～ 100％,which can meet the application requirements of inductively coupled plasma mass spectrometer.