光学自由曲面超精密加工方法综述

摘要

介绍了几种典型的光学自由曲面，如离轴非球面、环曲面、Zernike曲面、微结构光学曲面、样条曲面和双对称曲面。评述了目前光学自由曲面超精密加工的方法，包括复制成型、CNC磨削/抛光、飞切加工、慢速溜板伺服和快速刀具伺服等，同时分析对比了上述方法的优点和不足之处，并展望了光学自由曲面的加工方法的发展方向。%Introduces several kinds of typical optical freeform surface ,such as off-axis aspheric surface ,toric surface,Zernike sur-face,micro-structure of optical surfaces ,spline surface and bisymmetric surface .The existing methods that include molding ,CNC lapping and polish,fly cutting,slow slide servo,and fast tool servo have been discussed ,and their highlights have been contras-tively analyzed ,the development of the method for machining optical freeform surface has also been prospected .