在光栅机械刻划加工过程中，光栅铝膜的隆起对机刻光栅槽形质量影响十分明显。为了研究光栅铝膜的隆起特性，采用了纳米压痕试验的方法，对光栅铝膜的纳米压入过程进行了理论建模和仿真分析，发现在光栅铝膜纳米压痕过程中，材料的隆起高度随着压入深度的增加而呈线性增加，随着摩擦因数的增加而减小；材料的相对隆起量在压入深度范围内基本保持不变。此外，仿真结果与理论计算结果的误差范围随着摩擦因数的增加而增加，当摩擦因数一定时，在最大压深处取得最小值。%The effect of the pile-up which appears in the process of mechanical ruling of grating on aluminum film is very obvious to the quality of mechanical ruling of grating .In order to study the pile-up properties of grating aluminum film ,this paper analyzed the nano indentation test process of grating aluminum film by the method of theoretical modeling and simulation .The results show that in the nano-indentation process of aluminum film , the pile-up height of the film increases linearly when the indentation depth increases and decreases with the increase of friction coefficient ;Relative pile-up height of the materials remains unchanged in the scope of the indentation depth .In addition ,when the friction coefficient increases ,the error range between the simulation results and the theoretical calculation increases and the error gets a minimum value at the maximum indentation depth .
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