用于拼接干涉仪的五维运动台测试

摘要

Multi-dimensional motion stage with high accuracy and high stability is an indispensable part of the stitching interferometer. Therefore the precision and stability of the multi-dimensional motion stage directly affect the accuracy of measurement of the stitching interferometer. By utilizing the laser interference measurement system, the route and the resolution ratio of the five-dimension motion stage can be measured. By utilizing the spectrum experiment, the mode of the five dimensional motion can be measured. By utilizing the surface shape measuring interferometer, the drift of the five dimensional motion in the long time work can be tested with interfering the moving stripes. This paper will provide the important basis for the development of the stitching interferometer.%高运动精度、高稳定性的多维运动台是拼接干涉仪必不可少的组成部分，因此运动台精度和稳定性直接影响拼接干涉仪的测量精度。通过激光干涉测量系统测量了五维运动台的行程、分辨率。运用频谱实验测量了五维运动台的模态。利用面形测量干涉仪，通过干涉条纹移动测试了五维运动台长时间工作中的漂移，为拼接干涉仪的研制提供了重要依据。