激光干涉仪在平面度检测中的应用

摘要

The advantage of the laser and electronic level which are used to measure flatness of plane with rectangle method and diagonal method is compared and analyzed. The result shows that the laser has the advantages of high precision, intuitive on flatness measurement.%对岩石平板的平面度进行测量，采用激光干涉和电子水平仪为检测工具，用矩形法和对角线法分别测量平面度，通过对两种不同测量工具测量平面度的分析，比较两种工具优势特点，为平面度检测提供测量依据。实验表明，采用双频激光干涉仪测量平面度，具有直观、高精度的测量优势。