热效应对注入纯铁的氮分布的影响

摘要

研究了氮在常温（＜100°C）、150°C、250°C和3 50°C注入α-Fe后的深度分布，以及常温注入后再经150°C或250°C保温1h退火 后氮的深度分布和TEM组织分析，结合理论计算结果讨论了注入温度对氮分布的影响。结 果表明：氮分布特征取决于离子与基体原子级联碰撞的弹道式混合作用、基体对氮迁移的约 束作用和扩散作用。%The nitrogen distribution of pure iron implanted by N at room temperature, 150°C, 250°C, 350°C and annealed at 150°C, 250°C is studied. The effects of implantation temperature on N depth profiles are fu rther discussed based on the analytical results of TEM and the N theoretical di stribution. The shape of N depth profiles depends strongly on implantation temp erature. Ballistic mixing effect, matrix trapping effect, diffusing effect in t urn govern the N profiling results in the N-containing layer of α-Fe as impla ntation temperature elevates.