贵金属钌粉制备技术及应用研究进展

摘要

Ruthenium powder is one of key materials for preparation of high-purity ruthenium compounds and sputtering targets. With the development of electronic elements, the demand for ruthenium powder is increasing. In the evaluation of precious metal powder industry the ruthenium powder tends to be ignored. This paper reviews the current application of ruthenium powder and the progress of the state-of-art of ruthenium powder preparation, in particular, highlighting Japan＇s technical condition of high purity ruthenium powder.%钌粉是制备钌靶材、高纯钌化合物等材料的关键原材料之一。随着电子元器件的发展，对钉粉的需求量越来越大。在对贵金属粉末产业的评价中，往往会忽略钌粉末。本文综述了当前钌粉应用研究的进展状况及钌粉制备技术的现状，尤其是突出了日本在制备高纯钌粉方面的技术状况。