超精密光学磨床主轴的温度场分布及其优化设计

摘要

In order to ensure the accuracy of temperature field distribution analysis and improve the machine precision ,a thermal conductivity anal-ysis model based on thermodynamic theory and fi-nite element analysis is presented .Firstly ,free e-lectron gas model and Debye model are applied to calculate the thermal conductivity of main materi-als of ultra precision optical machine spindle . T hen the temperature rise law of the spindle under different structures and situations is analyzed ,a structure optimization method of ultra precision optical machine spindle is finally presented by re-ducing the contact area between the heat source and spindle ,optimizing the connections between spindle and point contact components .As a re-sult ,the thermal deformation is reduced and the machine accuracy is improved .%为了提高所设计的超精密光学磨床精度和提高温度场分析的准确性，利用有限元分析软件ANSYS和热力学理论，分析了超精密光学磨床主轴的温度场分布。首先，建立自由电子气模型，计算出自主设计的超精密光学磨床主轴材料的热导率；进而研究分析不同结构、不同环境下机床主轴的温升规律；最后，提出了基于热力学分析结果的一系列主轴结构优化方法，采取对主轴和点接触件进行优化设计，减小热源与主轴之间的接触面积等方法，减小机床主轴的热变形，从而提高超精密光学磨床的精度。