激光测量几何误差补偿算法

摘要

As one of important measuring means,laser technology is widely used in precision motion control systeM.The accuracy of the motion control system is often limited by the errors occurs during the laser measuring,especially for the geometrical errors,such as abbe error and cosine error,which should be corrected in precision servo control.Based on four laser interferometers measurement model of precision mo-tion stage,the reasons of abbe error and cosine error are introduced. Without consideration of machining er-rors and installation errors, the calculation models of geometrical errors of one interferometer for tilt of the motion stage is derived,and the data error compensation model of the laser measurement is deduced.The proposed algorithm could be used to compensate the data of the four interferometers generally under imper-feet situation.Finally ,this method is successfully used in practice, which demonstrates the effectiveness andreliability of the proposed algorithm.%激光技术作为重要的测量手段,已经被广泛的应用到精密运动控制系统中.激光测量误差直接影响到运动控制系统的控制精度,其中阿贝与余弦误差等几何误差对激光测量精度影响显著,在精密运动控制中必须予以补偿与校正.以精密运动台多维激光测量模型为基础,介绍了阿贝与余弦误差产生原因.在不考虑激光干涉仪的加工和安装误差的情况下,推导了运动台存在倾斜角度下的阿贝与余弦误差计算模型,在此基础上给出了激光测量数据误差补偿模型,以实现测量数据的实时补偿与修正.算法已经成功应用在实例中,表明该算法的有效性与可靠性.