一种用于液体静压导轨的高精密液压站设计

摘要

Hydraulic static pressured guide is the important function unit of precision machine tool. Hydraulic station is indispen-sable and supplementary unit for hydraulic static pressured guide in normal operation,and must provide hydraulic static pressured guide with lubricating oil of invariable pressure. An ultra-precision hydraulic station for hydraulic static pressured guide was designed. In this hydraulic station,lubricating oil was provided by precision gear pump driven by variable frequency motor,and pressure export was ensured to be steady by full-closed loop feedback control. The export pressure precision of the hydraulic station can reach ± 0.05%. Good effect is gained in the application of the hydraulic station on the hydraulic static pressured guide of ultra-precision machine tool.%液体静压导轨是精密超精密加工机床的重要功能单元，液压站是液体静压导轨正常工作的必要辅助单元。液体静压导轨要保持高的精度，液压站必须能够为静压导轨提供压力非常稳定的润滑油输入。设计一种用于液体静压导轨的高精密液压站，该液压站利用变频电机驱动精密齿轮泵供给润滑油，利用全闭环反馈调节装置控制润滑油的稳压输出。实际测量证明：该液压站的输出压力稳定精度可达±0.05％，应用于超精密机床上的液体静压导轨取得了良好的效果。