微细组合电加工样机研制及实验研究

摘要

基于新研发的一套微细组合电加工样机μEM-200CDS2,介绍了研发过程中探索出的最小脉宽可以达纳秒级的双功能微能脉冲电源以及样机中的若干关键技术,包括放电状态的双参数检测技术、 工具电极在位多功能磨削技术、 工作液稳定供给控制技术等.其中,双功能微能脉冲电源具备主动消电离环节,可以减少脉间的残余电荷放电,有利于提高加工表面质量;组合电加工样机床身设计有利于提高系统的加工精度和效率.最后,结合小孔的加工试验研究了典型的组合电加工工艺过程,结果表明:该过程中,可以并行完成工具电极在位修整与零件加工,有利于提高微小特征的加工效率.%Micro-energy pulse power supply with dual function of minimum pulse width of nanoseconds arrived in development and some key technologies were introduced based on a latest developed combined electrical micromachining machine ( EMM) typedμEM-200CD2S .It was described of double-parameter detection method for discharging status, tool electrode multifunction grinding de-vice on-machine and working fluid stable supplying control technology, and etc.Among which, the dual functional micro-energy pulse power supply was capable of active releasing residual charge.It was good to improve machining surface quality.The mechanical struc-ture of combined EMM was designed to improve machining accuracy and efficiency.Finally a typical combined electrical machining pro-gress technology was researched in micro-hole machining experiment.In the process, tool electrode on position finishing and parts ma-chining can be implemented in parallel, which is helpful of improving machining efficiency with micro-feature.