工艺参数对单晶硅超精密加工切削力的影响

摘要

为了了解单晶硅超精密车削过程中不同切削参数及刀具前角对切削力的影响,利用单晶金刚石车刀对单晶硅进行单因素变量超精密车削试验.试验结果表明:进给量f和切削深度ap对X、Y、Z方向的切削力F均有增大的趋势;而在切削速度vc增加时,各方向的F逐渐减小;切削前角减小时,切削力反而增大.通过各因素对切削力F的变化幅值可以得到,对F影响较大的参数为ap及f.选取最佳组合参数对单晶硅进行超精密切削试验,得到极为光滑的表面.%In order to understand the single crystal silicon ultra-precision cutting process of influence of cutting parameters and tool rake angle on cutting force , single crystal silicon to make use of single crystal diamond tool of single factor variable ultra-precision turning experiment was done .The test results show that the feed f and cutting depth ap in X, Y, Z three directions of the cutting force F have all increasing trend;and when the cutting speed vc increases, in all the direction of F is gradually decreased.When reduced cutting rake angle , cutting force has a tendency to increase .Through changing value of cutting force F by all factors to obtain the select-ed optimal combination parameters of ap and f.which influenced much to F for ultra-precision cutting test of the single crystal silicon , very smooth surfaces are gotten .