分子泵用小型电机试验平台的设计

摘要

为便于测试研制分子泵用小型电机的特性,设计一套专用的试验平台.因为被测电机运行转速高(>20 000 r/min),且需置于真空环境(<100 Pa),设计了高精度的定位基准、模拟实际运行环境的小型真空室、模拟电机实际负载惯量的惯量盘以及其他便于试验的装置.已经使用该试验平台开展了针对研制电机的性能测试.%In order to test the small motor used in molecular pump,an experimental platform was designed for the motor.Because the tested motor ran at a high speed(>20 000 r/min) and was placed in high vacuum environment(<100 Pa),a high precision location datum,small vacuum room to simulate the actual running environment for the motor,an inertia disk to simulate moment of inertia of the actual load and other parts were designed to make experiments easier.By the designed experimental platform,a lot of experiments to measure the performance of the motor have been made.