电子级六氟乙烷的色谱分析

摘要

In this paper, we used helium ionization chromatograph to analyze high-purity hexafluoroethane of electric grade. The result showed that this method realized the full analysis for hexafluoroethane of electric grade, as well as providing ex-perimental basis for the establishment of the standard for hexafluoroethane of electric grade.%使用氦离子化色谱仪对电子级六氟乙烷进行分析，结果显示本实验方法很好的实现了电子级六氟乙烷杂质的色谱全分析，并且为建立电子级六氟乙烷标准提供实验基础。