微量氟化氢标准气体的制备研究

摘要

采用称量法,使用不同处理方式的铝合金气瓶制备微量氟化氢标准气体,对微量氟化氢制备的适用气瓶进行筛选.选用吸附性较小的气瓶,对其进行预饱和处理,考察了预饱和氟化氢样品的浓度、预饱和时间和残留压力对微量氟化氢标准气体制备的影响.同时,考察了制备装置对微量氟化氢标准气体制备的影响,并研制出高重复性和灵敏度的分析方法,用于所研制标准气体的量值检验.%Using weighing method,preparation of trace amount of hydrogen fluoride standard gas in aluminum alloy cylin-ders treated with different methods is researched,so as to select the suitable cylinders.Then, choose cylinders with little adsorption,by pre-saturation treatment,investigated the influence of pre-saturated hydrogen fluoride concentration,pre-sat-urated interval and residual pressure in the cylinder on the preparation of hydrogen fluoride standard gas.At the same time, the influences of filling equipment on the preparation of the standard gas of trace hydrogen fluoride were investigated, and the method of high repeatability and sensitivity was developed for the measurement of standard gas.