With the development of micro-nano fabrication, the measurement of thermo-physical property of micro-nano material becomes more significant. At first, the basic principle of measurement of the thermo-physical property of micro-nano material with femtosecond laser and the means of realization were introduced. And then, two-temperature model, hyperbolic two-step model, hyperbolic one-step model, parabolic one-step model, dual-phase-lag model and parabolic two-step model were compared. Secondly, the characteristics of the measurement of the thermo-physical property of micro-nano material with femtosecond laser were introduced. Thirdly, three common system such as single-color femtosecond laser pump in front and probe system, two-color femtosecond laser pump in front and probe system, and single-color femtosecond laser pump and probe system in different side were introduced. Finally, the direction of future research in measurement of the thermo-physical property of materials was pointed out.%随着微纳加工技术的发展,微纳尺度下材料的热物性参量测量变得尤为重要.首先介绍了飞秒激光测量微纳尺度下材料热物性参量的基本原理、测量系统的实现方法,对比了所采用的双温模型、双曲两步辐射模型、双曲一步模型、抛物一步模型、双相滞模型和抛物两步模型等主要的传热模型.其次,介绍了飞秒激光测量物性参量的基本特点.然后,介绍了单波长正面抽运与探测系统、双波长正面抽运及探测和加热探测不同侧3种常见结构的飞秒激光物性测量系统.最后,展望了飞秒激光物性测量的研究方向.
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