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Advances in femtosecond micromachining and inscription of micro and nano photonic devices

机译:飞秒微加工技术及微纳光子器件的研究进展

摘要

This thesis has focused on three key areas of interest for femtosecond micromachining and inscription. The first area is micromachining where the work has focused on the ability to process highly repeatable, high precision machining with often extremely complex geometrical structures with little or no damage. High aspect ratio features have been demonstrated in transparent materials, metals and ceramics. Etch depth control was demonstrated especially in the work on phase mask fabrication. Practical chemical sensing and microfluidic devices were also fabricated to demonstrate the capability of the techniques developed during this work. The second area is femtosecond inscription. Here, the work has utilised the non-linear absorption mechanisms associated with femtosecond pulse-material interactions to create highly localised refractive index changes in transparent materials to create complex 3D structures. The techniques employed were then utilised in the fabrication of Phase masks and Optical Coherence Tomography (OCT) phantom calibration artefacts both of which show the potential to fill voids in the development of the fields. This especially the case for the OCT phantoms where there exists no previous artefacts of known shape, allowing for the initial specification of parameters associated with the quality of OCT machines that are being taken up across the world in industry and research. Finally the third area of focus was the combination of all of the techniques developed through work in planar samples to create a range of artefacts in optical fibres. The development of techniques and methods for compensating for the geometrical complexities associated with working with the cylindrical samples with varying refractive indices allowed for fundamental inscription parameters to be examined, structures for use as power monitors and polarisers with the optical fibres and finally the combination of femtosecond inscription and ablation techniques to create a magnetic field sensor with an optical fibre coated in Terfenol-D with directional capability. Through the development of understanding, practical techniques and equipment the work presented here demonstrates several novel pieces of research in the field of femtosecond micromachining and inscription that has provided a broad range of related fields with practical devices that were previously unavailable or that would take great cost and time to facilitate.
机译:本文重点研究了飞秒微加工和铭文研究的三个关键领域。第一个领域是微机械加工,其工作重点是能够加工出高度可重复,高精度的机加工,通常具有极其复杂的几何结构而几乎没有或几乎没有损坏。高纵横比的功能已在透明材料,金属和陶瓷中得到证明。蚀刻深度控制在相位掩膜制造中得到了特别的证明。还制造了实用的化学传感和微流体设备,以证明在这项工作中开发的技术的能力。第二个区域是飞秒铭文。在这里,这项工作利用了与飞秒脉冲-材料相互作用相关的非线性吸收机制,在透明材料中产生高度局部的折射率变化,从而创建了复杂的3D结构。然后,所采用的技术被用于制造相位掩膜和光学相干断层扫描(OCT)幻像校准伪像,这两种伪像都显示出在开发领域中填补空白的潜力。对于OCT体模来说尤其如此,因为以前没有已知形状的伪像,因此可以对与OCT机器质量相关的参数进行初始指定,而这些参数在全世界的工业和研究中都在使用。最后,第三个重点领域是通过在平面样本中进行工作而开发的所有技术的结合,以在光纤中创建一系列伪像。补偿与处理具有变化的折射率的圆柱样品相关的几何复杂性的技术和方法的发展,使得可以检查基本铭文参数,用作光纤的功率监视器和偏振器的结构,最后结合飞秒题词和消融技术来创建磁场传感器,该传感器具有在Terfenol-D中涂覆的具有定向能力的光纤。通过理解,实用技术和设备的发展,本文介绍的工作展示了飞秒微加工和铭文领域的一些新颖研究,这些研究为广泛的相关领域提供了以前无法获得或将花费巨大的实用设备。和时间方便。

著录项

  • 作者

    Smith Graham;

  • 作者单位
  • 年度 2011
  • 总页数
  • 原文格式 PDF
  • 正文语种 English
  • 中图分类

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