双折射双频HeNe激光器功率调谐纳米测量研究

摘要

A novel principle on displacement measurment with nanometer resolution based on birefringent dual-frequency HeNe laser is presented.We transformed the displacement to be measured into the change of cavity length of a frequency-split HeNe laser.Based upon intensity tuning characteristics of the two split frequencies (ordinary light and extraordinary light),we realized the measurement with λ/2(about 0.3μm)resolution and large measuring range (several millimeters).And in the measuring range of λ／2,we utilized the point where o-light and e-light have equal intensity to improve the resolution of measurement up to nanometer.With combining measurement of low resolution in large measuring range with high resolution in small measuring range,we demonstrated a new method for displacement measurement with nanometer resolution and relatively large measuring range.%提出一种基于双折射双频HeNe激光器功率调谐特性的纳米测量原理。当双折射双频HeNe激光器谐振腔长变化时，利用分裂的两个频率的寻常光(o光)和非寻常光(e光)功率调谐特性实现大范围里λ/2(约为0.3μm)低分辨率的测量，在λ/2范围里用o光和e光的等光强点实现纳米级分辨率的测量。将大范围的粗测和小范围的精测结合起来实现较大范围的纳米测量。