半导体激光器在氧气探测中的应用及关键技术

摘要

In many industrial and medical rields, oxygen probe is important. This paper briefly discussed the features and advantages of TDLAS technique developed in recent years, reviewed the performance of different kinds of semiconductor lasers as irradiance source for the TDLAS technology in the oxygen probe. The application and progress of DFB and VCSEL structure semiconductor lasers which are considered as the competitive irradiance sources for detection of oxygen are focused on.%氧气探测在工业、医疗等诸行业都有重要意义.本文简述了近几年发展起来的TDLAS技术之特点及优势,评述了各种半导体激光器作为激发光源用于TDLAS技术进行氧气探测的性能,着重讨论了在氧气探测方面具有发展前景和竞争优势的DFB和VCSEL结构激光器光源的应用和进展.