硬质合金高温化学气相沉积TiC涂层工艺研究

摘要

采用高温化学气相沉积在YG8基体上制备TiC涂层,研究沉积温度、沉积时间、H2流量、H2/CH4(流量比)以及TiCl4流量对镀层的抗弯曲强度、膜基结合力及表面显微硬度的影响,并通过正交试验优化工艺参数。结果表明：当沉积温度为1000℃,沉积时间为90 min,H2流量为400 ml,H2/CH4(流量比)为15∶1,TiCl4流量为80 mL时,镀层具有优良的性能,抗弯曲强度达到1100 N,表面显微硬度达到3228 HV,膜基结合力达到90 N。%TiC composite coating were prepared on the YG8 substrate with high temperature chemical vapor deposition ( HT-CVD) method. Effects of temperature and time, and the flow of H2 , H2/CH4 and Ticl4 on the bending strength, strength and microhardness of film, and on the bonding strength of thin film-matrix were investigated. The depositing parameters were optimized through orthogonal test. The results indicate that fine composite coating can be these:deposited at 1000℃ for 90 min, and with the flow of H2 is 400ml, the H2/CH4 is 15:1, the flow of TiCl4 is 80ml, its bending strength is 1100N, its microhardness is 3228HV, the bonding strength of thin film-matrix is 90N.