A type of crank beam electro-thermal mircro actuator was prescribed Mechanical model of the actuatar was estabilished,and the static characteristic was analzed Comparing the theoretical analzsis with experimental data,it is found that the thermodynamic character of material in micro actuator has a different variable regularity contrasted to that used in macro scale machines.it is the micro scale effect that results in the deriation between the simulating result and experimental results the thermodynamic expression of polysilicon which was fitted by means of the experimental data concerned was used to modify the mechanical model The modifiex model ,in which the mircro scale thermodynamic characteristic characteristic was considered,was more reasonable and could make the optimal design and control strategies analyzing the straight-line micro actuator more feasible.
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