双T型MEMS仿生矢量水听器的设计与测试

摘要

In view of the demand of current sonar systems, a novel double T-shape vector hydrophone was proposed based on piezoresistive effect, bionic principle and MEMS technology. Based on mechanical properties analysis of the T-shape beam, design, simulation, fabrication and test of double T-shaped vector hydrophones with two different sizes were described. The microstructure of the hydrophone was statically simulated with ANSYS, and the first-order resonance frequencies of the two microstructures were 1993. 3Hz and 10. 17 kHz, respectively. The microstructure of the hydrophone was manufactured with MEMS technology and was encapsulated. The hydrophone was measured using a shaking table and an underwater standing wave field. The test results showed that their receiving sensitivity is up to -180dB and -192dB atrn1 kHz (OdB = 1V/μPa) , their dynamic range is 90. 48 dB and the two vector hydrophones possess a good "8" directional pattern.%根据当前声纳系统的需求,以MEMS技术为依托,结合仿生原理、压阻原理,提出了一种双T型矢量水听器.在分析T型梁结构力学特性的基础上,详细介绍了两种不同尺寸微结构的设计、加工和测试.采用ANSYS软件仿真,得出两种微结构的谐振频率分别为1 993.3 Hz和10.17 kHz；利用MEMS加工工艺加工出水听器微结构并对水听器进行了封装；采用振动台标定和水下驻波场测试相结合的方法完成了水听器的测试.测试结果表明两种结构的双“T”型矢量水听器灵敏度达到-180 dB和-192 dB(1 kHz,0 dB参考值1 V/μPa),具有良好的“8”指向性,矢量特性明显,动态范围为90.48 dB(315 Hz).