智能微位移主动隔振控制系统的研究

摘要

针对精密加工设备的微位移隔振问题，设计了一种以压电陶瓷为作动器的新型智能微位移主动隔振控制系统，在 NI PXI 数据采集系统和 BK 激振器的基础上，搭建了该系统的实验平台，提出将有源噪声控制理论应用到微位移振动的主动控制中，开发了在 LabVIEW 软件环境下整个系统的数据采集和 F-XLMS 控制算法的控制程序，分别在正弦、扫频和随机激励信号下进行微位移主动隔振实验研究，结果表明三种激励信号受控后的振动位移大幅度降低，验证了该系统对微位移主动隔振的有效性，为精密仪器、微纳米设备的微位移智能主动隔振系统设计奠定了基础。%In order to isolate the mirco-displacement vibration of precision instruments,a smart micro-displacement active vibration isolation system consisting of PZT actuators,sensors and controllers was proposed here.Based on a NI PXI data acquisition system and BK vibration exciters,the hardware experiment platform for the micro-displacement active vibration isolation control system was built in detail.The principles of active noise control technology were applied in the mirco-displacement active vibration control.The data acquisition and F-XLMS control algorithm were developed by using LabVIEW.The experimental study was conducted under sine,sweep and random excitation signals,respectively.The results verified the validity of the micro-displacement active vibration isolation system.This investigation provided an important theoretical foundation for design of micro-displacement active vibration isolation systems of precision instruments and micro-nano equipments.