大型衍射光栅刻划机控制系统研究

摘要

介绍了大型高精度衍射光栅刻划机的机械结构及其控制系统设计,并针对具有复杂机械结构的控制系统研究了一种新的仿真方法.通过利用Pro/Mechanism模块中的Custom Load(定制负荷)插件实现控制算法,从而在虚拟样机上实现运动控制的仿真.采用这种方法,在光栅刻划机上进行了精定位控制仿真,并基于仿真结果进行控制方案优化,提高了控制系统的开发效率和控制方案的有效性.%The mechanical structure and control system of a large and high-precision diffraction grating ruling engine were described and a new simulation method was presented for the control system with a complex mechanical structure. A Custom Load plug-in of Pro/Mechanism was used to implement the control algorithm, ancj the motion control was simulated on the virtual prototype. In this way, simulation of the precision positioning of a grating ruling engine can be performed to optimize the control logic based on the simulation result, which improves the development efficiency and effectiveness.