从模糊图像中恢复集成电路版图技术

摘要

为将模糊的集成电路版图进行复原,探讨了Lucy-Richardson滤波、维纳滤波、拉格朗日乘法算子最小二乘方滤波方法.研究发现:噪声模糊图像进行复原时,Lucy-Richardson方法基本恢复不出集成电路版图,维纳滤波的去噪声明显但是图像清晰度不够,拉格朗日乘法算子最小二乘方滤波复原版图清晰;恢复清晰集成电路的版图可以用于集成电路的结构分析和集成电路失效机理诊断.%In order to recover of integrated circuit layout from the fuzzy image, various methods including LucyRichardson, the Wiener filter, Lagrangian least squares filtering are discussed.It is found that the integrated circuit layout almost can not recovered from the fuzzy image in the present of noise by Lucy-Richardson method.The Wiener filter is an effect method for the denoising, but obviously it is not enough for receiving clear image.The Lagrange least squares filtering is the most for restoration of the integrated circuit layout.To restore a clear layout of integrated circuits can be applied to structural analysis and failure exploration of integrated circuit.