基于标量衍射理论,建立了分析光栅拼接误差的理论模型.计算了拼接过程中的垂直角偏、母线偏转两种旋转误差对光栅远场的影响,得到了解析表达式.数值分析了旋转误差及旋转误差与平移误差同时存在时的远场分布,结果表明不同误差存在时远场分布不同,旋转误差对远场分布影响较大,母线偏转与平移误差之间存在一定的补偿性,若使光栅达到良好拼接,旋转误差必须控制在微弧度级以下.%Based on the scalar diffraction theory, a theoretical modal which can reveal the misalignment from far-field pattem distribution was built, the analytical equation of the far-field intensity was obtained.The numerical calculated results indicate that far-field pattems vary with different kinds of error, the inlluence of rotating error on the performance of tiled grating is relatively severe, the far-field pattem will distort when the rotating error is greater than 1. 7 μ rad and the maximum normalized intensity will decrease to 0. 9. When both the translational and rotating error exists, the tolerance of the alignment error is stricter than only one existing. But the rotating error around the z axis can compensate the translation error in some sense.
展开▼
